ZYGO 4104C
Product Description
The ZYGO ZMI – 4104C is a measurement electronics board that belongs to the ZMI™ series3. It is designed for use with interferometers, playing a vital role in high – precision displacement measurement3. It can calculate displacements based on the optical signals from interferometers driven by the ZMI™ laser source4. With its modular design, it can be added to a VME chassis and combined with other ZMI™ series boards to scale up to 64 axes of measurement, meeting the needs of complex measurement setups3. This board is widely used in fields such as nanotechnology and semiconductor manufacturing, which require high – precision positioning3.
Product Parameters4
- Axes per Board: 4
- Board Type: 6U VME64x
- Minimum Optical Power: 0.07 μW
- Position Resolution: 0.15 nm
- Maximum Velocity: ± 2.55 m/s
- Accuracy at Maximum Velocity (σ): 0.2 nm
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